MEMS reliability
Lasse Skogström, Jue Li, Toni T. Mattila, Vesa Vuorinen
Topics & Concepts
Microelectromechanical systemsReliability (semiconductor)MicroelectronicsMicrofabricationAerospaceElectronicsAutomotive industryEngineeringReliability engineeringMaterials scienceNanotechnologyElectrical engineeringAerospace engineeringFabricationPower (physics)PhysicsMedicineQuantum mechanicsPathologyAlternative medicineAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devices