Heteroepitaxy of ε-Ga2O3 thin films grown on AlN/Si(1 1 1) templates by metal–organic chemical vapor deposition
Weiqu Chen, Zimin Chen, Zeqi Li, Zeyuan Fei, Yanli Pei, Gang Wang, Zhiyuan He
Topics & Concepts
Thin filmMaterials scienceMetalorganic vapour phase epitaxySiliconChemical vapor depositionScanning electron microscopeNucleationCoalescence (physics)Substrate (aquarium)EpitaxyTransmission electron microscopyLayer (electronics)Analytical Chemistry (journal)CrystallographyChemical engineeringOptoelectronicsNanotechnologyChemistryComposite materialOrganic chemistryPhysicsAstrobiologyEngineeringGeologyOceanographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques