Effect of growth pressure on sulfur content of RF-magnetron sputtered WS2 films and thermal oxidation properties of them toward using Pd decorated WO3 based H2 gas sensor
Soheil Mobtakeri, Saman Habashyani, Ömer Çoban, Hasan Feyzi Budak, Ahmet Emre Kasapoğlu, Emre Gür
Topics & Concepts
SputteringStoichiometryMaterials scienceSputter depositionSulfurTungstenThin filmAnalytical Chemistry (journal)TorrCavity magnetronMetallurgyChemistryNanotechnologyPhysical chemistryPhysicsChromatographyThermodynamicsGas Sensing Nanomaterials and SensorsTransition Metal Oxide NanomaterialsZnO doping and properties