Synergistic effects of PBTCA and ABO on the chemical mechanical polishing of titanium barrier layers in TSV application
Le Zhai, Xueli Yang, Liunan She, Yingqi Di, Guofeng Pan, Jie Cheng
Topics & Concepts
PolishingABO blood group systemTitaniumChemical-mechanical planarizationMaterials scienceComposite materialMetallurgyMedicineImmunologyAdvanced Surface Polishing TechniquesAdvanced materials and compositesMetal and Thin Film Mechanics