High-performance chemical mechanical polishing of GCr15 bearing steel enabled by the synergistic action of oxalic acid and H2O2
Jinwei Liu, Liang Jiang, Gangguo Xiao, Linmao Qian
Topics & Concepts
Oxalic acidChemical-mechanical planarizationMaterials scienceSurface roughnessBearing (navigation)LubricationCorrosionPolishingMetallurgySlurrySurface finishChemical engineeringChemistryComposite materialInorganic chemistryCartographyEngineeringGeographyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics