Comparative first-principles analysis of crystalline versus amorphous CeO2 particles: implications for chemical mechanical planarization
Sung-Won Park, Jihoon Seo
Topics & Concepts
Chemical-mechanical planarizationMaterials scienceAmorphous solidDensity functional theoryBulk modulusChemical physicsModulusBand gapChemical bondPhase (matter)NanotechnologyComposite materialCrystallographyComputational chemistryPolishingChemistryOrganic chemistryOptoelectronicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites