A new magnetic enhanced chemical mechanical polishing method for quartz glass slender holes
Jiang Guo, Pu Qin, Qikai Li, Xu Zhu, Gaoliang Dai, Chunjin Wang, Chi Fai Cheung
Topics & Concepts
PolishingAbrasiveChemical-mechanical planarizationMaterials scienceMagnetic fieldComposite materialMechanical engineeringEngineering drawingEngineeringPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization