Nitrogen flow rate dependent atomic coordination, phonon vibration and surface analysis of DC magnetron sputtered nitrogen rich-AlN thin films
Aishwarya Madhuri, Sanketa Jena, Mukul Gupta, Bibhu P. Swain
Topics & Concepts
Wurtzite crystal structureMaterials scienceThin filmCrystalliteSputter depositionRaman spectroscopyCavity magnetronCrystallographyAnalytical Chemistry (journal)ChemistrySputteringNanotechnologyOpticsHexagonal crystal systemMetallurgyChromatographyPhysicsGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties