An ultra-smooth planarization method for controlling fluid behavior in cluster magnetorheological finishing based on computational fluid dynamics
Bin Luo, Qiusheng Yan, Jingfu Chai, Wenqing Song, Jisheng Pan
Topics & Concepts
PolishingMagnetorheological fluidMaterials scienceMachiningChemical-mechanical planarizationSurface roughnessComposite materialWaferMicrostructureSurface finishMagnetic fieldMetallurgyNanotechnologyPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationForce Microscopy Techniques and Applications