High quality nanogratings far beyond diffraction limits on silicon efficiently fabricated using femtosecond laser dual-beam interference direct writing
Kang Li, Ruozhong Han, Mengqi Suo, Mingquan Long, Long Chen, Kaiqiang Cao, Shian Zhang, Donghai Feng, Tianqing Jia, Zhenrong Sun, Hongxing Xu
Topics & Concepts
FemtosecondInterference (communication)Materials scienceSiliconLaserDual (grammatical number)OpticsDiffractionLaser beam qualityOptoelectronicsBeam (structure)Quality (philosophy)Laser beamsPhysicsComputer scienceTelecommunicationsArtLiteratureQuantum mechanicsChannel (broadcasting)Advanced Surface Polishing TechniquesLaser Material Processing TechniquesNanofabrication and Lithography Techniques