Evaluation of chemical mechanical polishing characteristics using mixed abrasive slurry: A study on polishing behavior and material removal mechanism
Xiaoxiao Zhu, Juxuan Ding, Zhangchao Mo, Xuesong Jiang, Jifei Sun, Hao Fu, Yuziyu Gui, Boyuan Ban, Li-Xiao Wang, Jian Chen
Topics & Concepts
Chemical-mechanical planarizationPolishingAbrasiveMaterials scienceSlurrySurface roughnessDiamondAmorphous solidComposite materialSurface finishChemical engineeringMetallurgyChemistryCrystallographyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization