Large volume tomography using plasma FIB-SEM: A comprehensive case study on black silicon
Yu Zhang, Charlie Kong, Giuseppe Scardera, Malcolm Abbott, D.N. Payne, Bram Hoex
Topics & Concepts
Focused ion beamMaterials scienceScanning electron microscopeSiliconBlack siliconCharacterization (materials science)WaferMicroscopySample preparationNanotechnologyComposite materialOpticsIonChemistryOptoelectronicsPhysicsChromatographyOrganic chemistryAdvanced Electron Microscopy Techniques and ApplicationsAdvanced Materials Characterization TechniquesIntegrated Circuits and Semiconductor Failure Analysis