Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing
Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kentaro Kawai, Kenta Arima, Kazuya Yamamura
Topics & Concepts
PolishingDiamondMaterials scienceSurface roughnessScanning electron microscopeCrystal (programming language)Substrate (aquarium)Surface finishSingle crystalAnalytical Chemistry (journal)Transmission electron microscopyComposite materialOpticsChemistryCrystallographyNanotechnologyOceanographyComputer sciencePhysicsProgramming languageChromatographyGeologyDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesMetal and Thin Film Mechanics