Deposition of a Multilayer Coating in a Gas-Metal Beam-Plasma Formation at Low Pressure
В. В. Денисов, Yu. A. Denisova, E L Vardanyan, E. V. Ostroverkhov, А. А. Леонов, M. V. Savchuk
Topics & Concepts
Materials scienceCoatingPlasmaVacuum arcCathodeGlow dischargeDeposition (geology)Electric arcSputteringIon beam depositionIon beamBeam (structure)Analytical Chemistry (journal)Thin filmElectrodeComposite materialIon sourceNanotechnologyOpticsChemistryPhysicsChromatographyQuantum mechanicsPhysical chemistryBiologyPaleontologySedimentMetal and Thin Film MechanicsAdvanced materials and compositesHigh-Temperature Coating Behaviors