The effect of sputtering power on the structural and tribological behaviors at elevated temperature of Ta/Si co-doped DLC films
Yanxia Wu, Ke Li, Bang Shi, Jiawei Qi, Xiaoyan Zhou, Yongsheng Wang, Ke Zheng, Ying Liu, Shengwang Yu
Topics & Concepts
Materials scienceSputteringTribologyDopingMetallurgyEngineering physicsComposite materialThin filmNanotechnologyOptoelectronicsEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites