Development of high uniformity Al1-xScxN piezoelectric film stack dry etching process on 8-inch silicon wafers
Jiahui Yan, Yongxin Zhou, Songsong Zhang
Topics & Concepts
WaferMicroelectromechanical systemsDry etchingEtching (microfabrication)Materials sciencePhotoresistReactive-ion etchingOptoelectronicsFabricationSilicon nitrideSiliconNanotechnologyLayer (electronics)PathologyMedicineAlternative medicineAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics