On the synergy manipulation between the activation temperature, surface resistance and secondary electron yield of NEG thin films
Sihui Wang, Bangle Zhu, Yonghao Gao, Xin Shu, Wei Wei, Wenli Zhang, Yong Wang
Topics & Concepts
Electrical resistivity and conductivityGetterYield (engineering)Materials scienceThin filmSputteringKineticsSputter depositionSecondary electronsSheet resistanceElectronComposite materialNanotechnologyOptoelectronicsLayer (electronics)Electrical engineeringPhysicsQuantum mechanicsEngineeringParticle accelerators and beam dynamicsMetal and Thin Film MechanicsSemiconductor materials and devices