Effects of duty cycle on microstructure of TiN coatings prepared using CAE/HiPIMS
Chi-Lung Chang, Guojun Luo, Fu-Chi Yang, Jian-Fu Tang
Topics & Concepts
TinMicrostructureMaterials scienceDuty cycleCoatingFabricationHigh-power impulse magnetron sputteringDeposition (geology)Heavy dutyComposite materialMetallurgyElastic modulusNanotechnologyThin filmSputteringSputter depositionMedicineEngineeringPaleontologyQuantum mechanicsPathologyPhysicsAutomotive engineeringSedimentPower (physics)Alternative medicineBiologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis