Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques
Vukoman Jokanović, Nenad Bundaleski, Božana Petrović, Manuela Ferarra, Bojan Jokanović, Slavoljub Živković, Ilija Nasov
Topics & Concepts
Materials scienceTitaniumX-ray photoelectron spectroscopyCopperTitanium nitrideChemical stateMicrostructureThin filmNitrideSubstrate (aquarium)Analytical Chemistry (journal)DopingChemical engineeringMetallurgyComposite materialNanotechnologyChemistryOptoelectronicsLayer (electronics)Environmental chemistryOceanographyGeologyEngineeringMetal and Thin Film MechanicsSemiconductor materials and devicesElectronic and Structural Properties of Oxides