Study of deposition parameters and growth kinetics of ZnO deposited by aerosol assisted chemical vapor deposition
Sergio Sánchez-Martín, Santiago M. Olaizola, E. Castaño, Ernesto Urionabarrenetxea, G.G. Mandayo, I. Ayerdi
Abstract
Impact of deposition parameters, microstructure and growth kinetics analysis of ZnO grown by Aerosol-assisted Chemical Vapor Deposition (AACVD).
Topics & Concepts
NucleationChemical vapor depositionMaterials scienceDeposition (geology)MicrostructureChemical engineeringThin filmSubstrate (aquarium)Activation energyAerosolKineticsAnalytical Chemistry (journal)MineralogyChemistryComposite materialNanotechnologyPhysical chemistryOrganic chemistryBiologySedimentEngineeringPaleontologyQuantum mechanicsPhysicsChromatographyGeologyOceanographyZnO doping and propertiesCopper-based nanomaterials and applicationsGas Sensing Nanomaterials and Sensors