Effects of annealing temperature on the mechanical, optical, and electrical properties of hydrogenated, nitrogen-doped diamond-like carbon films
Hiroya Osanai, Kazuki Nakamura, Yuya Sasaki, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta, Yushi Suzuki, Maki Suemitsu, Hideki Nakazawa
Topics & Concepts
Annealing (glass)Materials scienceChemical vapor depositionNitrogenDiamond-like carbonPlasma-enhanced chemical vapor depositionDopingBand gapCarbon filmAnalytical Chemistry (journal)HeterojunctionHydrogenDiamondThin filmComposite materialChemical engineeringNanotechnologyChemistryOptoelectronicsEngineeringOrganic chemistryChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsCarbon Nanotubes in Composites