Mix-and-match lithography and cryogenic etching for NIL template fabrication
Martin Hofmann, Laura Weidenfeller, Shraddha Supreeti, Stephan Mechold, Mathias Holz, Christoph Reuter, Stefan Sinzinger, Eberhard Manske, Ivo W. Rangelow
Topics & Concepts
Nanoimprint lithographyMaterials scienceLithographyImage stitchingFabricationResistEtching (microfabrication)TemplateNanotechnologyNanolithographyOptoelectronicsNext-generation lithographyThroughputElectron-beam lithographyLayer (electronics)Computer scienceMedicineArtificial intelligenceAlternative medicineTelecommunicationsPathologyWirelessForce Microscopy Techniques and ApplicationsNanofabrication and Lithography TechniquesAdvancements in Photolithography Techniques