Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
Jung‐Hwan Lee, Maneesh Kumar Poddar, Kwang-Min Han, Heon-Yul Ryu, Nagendra Prasad Yerriboina, Tae‐Gon Kim, Yutaka Wada, Satomi Hamada, Hirokuni Hiyama, Jin-Goo Park
Topics & Concepts
Materials scienceImpurityPolydimethylsiloxaneBrushComposite materialScanning electron microscopeChemical engineeringOrganic chemistryChemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques