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High-pressure H2O post-annealing for improving reliability of LTPS and a-IGZO thin-film transistors within a coplanar structure

Jongmin Yoo, Jin-Hwan Hong, Hyojung Kim, Dongbhin Kim, Chankyu Lee, Minsoo Kim, Chang-Woo Byun, Byoungdeog Choi

2023Materials Science in Semiconductor Processing15 citationsDOI

Topics & Concepts

Materials scienceThin-film transistorOptoelectronicsThreshold voltageGate dielectricDielectricAnnealing (glass)Amorphous solidTransistorNanotechnologyVoltageElectrical engineeringLayer (electronics)Composite materialCrystallographyChemistryEngineeringThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceZnO doping and properties
High-pressure H2O post-annealing for improving reliability of LTPS and a-IGZO thin-film transistors within a coplanar structure | Litcius