Fabrication of multilayer Fresnel zone plate for hard X-ray microscopy by atomic layer deposition and focused ion beam milling
Yanli Li, Weier Lu, Shanfeng Wang, Qingxi Yuan, Xiangdong Kong, Han Li, Yang Xia
Topics & Concepts
Zone plateMaterials scienceFocused ion beamFabricationLayer (electronics)OpticsResistFresnel zoneTransmission electron microscopyX-rayMicroscopyNanotechnologyIonDiffractionChemistryPhysicsPathologyOrganic chemistryMedicineAlternative medicineAdvanced X-ray Imaging TechniquesX-ray Spectroscopy and Fluorescence AnalysisAdvanced Electron Microscopy Techniques and Applications