Shape classification of fumed silica abrasive and its effects on chemical mechanical polishing
Eungchul Kim, Jaewon Lee, Younghun Park, Cheolmin Shin, Jichul Yang, Taesung Kim
Topics & Concepts
Fumed silicaMaterials scienceAbrasiveSlurryPolishingChemical-mechanical planarizationColloidal silicaComposite materialAggregate (composite)Penetration (warfare)Particle (ecology)Transmission electron microscopyParticle sizeChemical engineeringNanotechnologyCoatingOceanographyEngineeringGeologyOperations researchAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchTunneling and Rock Mechanics