Effects of the annealing of amorphous Ta2O5 coatings produced by ion beam sputtering concerning the effusion of argon and the chemical composition
A. Paolone, E. Placidi, Elena Stellino, Maria Grazia Betti, E. Majorana, Carlo Mariani, A. Nucara, Oriele Palumbo, P. Postorino, Ilaria Rago, F. Trequattrini, M. Granata, Julien Teillon, D. Hofman, C. Michel, Anaël Lemaı̂tre, N. S. Shcheblanov, G. Cagnoli, F. Ricci
Topics & Concepts
Materials scienceSputteringAmorphous solidArgonCoatingIon beamAnnealing (glass)Analytical Chemistry (journal)Vacuum chamberComposite materialOpticsThin filmBeam (structure)NanotechnologyChemistryCrystallographyChromatographyPhysicsOrganic chemistrySemiconductor materials and devicesIon-surface interactions and analysisDiamond and Carbon-based Materials Research