A piezo-actuated nanopositioning stage based on spatial parasitic motion principle
Xiaolu Zhao, Fujun Wang, Beichao Shi, Yanling Tian, Dawei Zhang
Topics & Concepts
Tripod (photography)KinematicsCompliant mechanismControl theory (sociology)HingePlanarFinite element methodComputer sciencePhysicsEngineeringOpticsStructural engineeringClassical mechanicsArtificial intelligenceComputer graphics (images)Control (management)Piezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsCellular Mechanics and Interactions