Modulation of the conductive behavior of NiO thin film deposited by HiPIMS through varying the O2 flow ratio
Xiaoying Zhang, Chao Chen, Jin-Fa Zhang, Yu-Jiao Ruan, An Xie, Wan-Yu Wu, Dong-Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringNon-blocking I/OElectrical conductorModulation (music)Flow (mathematics)Thin filmOptoelectronicsNanotechnologyComposite materialSputteringSputter depositionAcousticsMechanicsChemistryBiochemistryCatalysisPhysicsTransition Metal Oxide NanomaterialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors