Impacts of the a-Si:H interlayer nanostructure on the adhesion of the thick DLC coatings prepared by PECVD
Xinyu Wang, Xudong Sui, Shuaituo Zhang, Mingming Yan, Yan Lu, Junying Hao, Weimin Liu
Topics & Concepts
Materials scienceDangling bondPlasma-enhanced chemical vapor depositionAdhesionNanostructureComposite materialLayer (electronics)PorosityStress (linguistics)SiliconNanotechnologyChemical engineeringThin filmMetallurgyLinguisticsPhilosophyEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices