Ga-concentration-dependent optical and electrical properties of Ga-doped ZnO thin films prepared by low-temperature atomic layer deposition
Yangfei Zhu, Yongjun Wu, Fa Cao, Xiaohong Ji
Topics & Concepts
Materials scienceThin filmDiffractometerX-ray photoelectron spectroscopyDopingAtomic layer depositionIndiumTransmittanceOptoelectronicsElectrical resistivity and conductivityScanning electron microscopeLayer (electronics)Analytical Chemistry (journal)NanotechnologyComposite materialChemical engineeringElectrical engineeringEngineeringChromatographyChemistryZnO doping and propertiesGa2O3 and related materialsGas Sensing Nanomaterials and Sensors