Low temperature deposition of BiFeO3 films on Ti foils for piezoelectric applications
Jing Yan, Jun Ouyang, Hongbo Cheng, Peng Yan
Topics & Concepts
Materials sciencePiezoelectricityPiezoelectric coefficientFerroelectricityMicroelectromechanical systemsPolarization (electrochemistry)DielectricSputter depositionComposite materialSputteringOptoelectronicsThin filmNanotechnologyChemistryPhysical chemistryMultiferroics and related materialsFerroelectric and Piezoelectric MaterialsDielectric properties of ceramics