Inkjet-printed CMUT humidity sensors with high sensitivity and low hysteresis
Zhou Zheng, Naeun Kim, William S. Wong, John T. W. Yeow
Topics & Concepts
Capacitive micromachined ultrasonic transducersMaterials scienceCapacitive sensingWaferRelative humidityHysteresisGravimetric analysisInkwellOptoelectronicsTransducerHumidityMicroelectromechanical systemsOxideNanotechnologyComposite materialElectrical engineeringChemistryMetallurgyThermodynamicsQuantum mechanicsPiezoelectricityOrganic chemistryEngineeringPhysicsGas Sensing Nanomaterials and SensorsAdvanced Sensor and Energy Harvesting MaterialsAnalytical Chemistry and Sensors