Moiré-based sub-nano misalignment sensing via deep learning for lithography
Nan Wang, Wei Jiang, Yu Zhang
Topics & Concepts
Extreme ultraviolet lithographyNanoscopic scaleDeep learningLithographyComputer scienceMoiré patternArtificial neural networkPhotomaskComputational lithographyMaterials scienceScale (ratio)Artificial intelligenceOpticsX-ray lithographyResistNanotechnologyOptoelectronicsComputer visionPhysicsLayer (electronics)Quantum mechanicsAdvancements in Photolithography TechniquesNanofabrication and Lithography TechniquesForce Microscopy Techniques and Applications