Fabrication of microlens array on chalcogenide glass by wet etching-assisted femtosecond laser direct writing
Weijie Zhou, Rao Li, Min Li, Pan Tao, Xunsi Wang, Shixun Dai, Baoan Song, Wei Zhang, Changgui Lin, Xiang Shen, Tiefeng Xu, Peiqing Zhang
Topics & Concepts
MicrolensMaterials scienceFemtosecondLaserChalcogenideEtching (microfabrication)OptoelectronicsOpticsFabricationChalcogenide glassIsotropic etchingInfraredCore (optical fiber)Lens (geology)Dry etchingUltravioletNanotechnologyComposite materialMedicinePathologyLayer (electronics)Alternative medicinePhysicsPhase-change materials and chalcogenidesAdvanced optical system designNonlinear Optical Materials Studies