Technology of static oblique lithography used to improve the fidelity of lithography pattern based on DMD projection lithography
Long Huang, Chunxia Liu, Han Zhang, Shaoqing Zhao, Mingyue Tan, Minzhe Liu, Zhongqing Jia, Ruizhan Zhai, Hua Liu
Topics & Concepts
LithographyMaskless lithographyOpticsMaterials scienceX-ray lithographyOblique casePhotomaskFabricationComputational lithographyPhotolithographyNext-generation lithographyProjection (relational algebra)ResistElectron-beam lithographyComputer sciencePhysicsNanotechnologyLinguisticsMedicinePhilosophyAlgorithmLayer (electronics)PathologyAlternative medicineNanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesElectrowetting and Microfluidic Technologies