Mixup-based classification of mixed-type defect patterns in wafer bin maps
Wooksoo Shin, Hyungu Kahng, Seoung Bum Kim
Topics & Concepts
Identification (biology)Computer scienceArtificial intelligenceArtificial neural networkPattern recognition (psychology)WaferConvolutional neural networkWafer fabricationBinSemiconductor device fabricationRegularization (linguistics)Data miningMachine learningEngineeringAlgorithmBotanyElectrical engineeringBiologyIndustrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure Analysis