Investigation of diffusion mechanism of beryllium in GaN
R. Jakieła, Kacper Sierakowski, Tomasz Sochacki, Małgorzata Iwińska, Michał Fijałkowski, A. Barcz, Michał Boćkowski
Topics & Concepts
BerylliumGalliumAnnealing (glass)DiffusionMaterials scienceGallium nitrideNitrideVacancy defectDopantSecondary ion mass spectrometryAnalytical Chemistry (journal)ChemistryCrystallographyIonDopingMetallurgyLayer (electronics)ThermodynamicsNanotechnologyOptoelectronicsOrganic chemistryChromatographyPhysicsGaN-based semiconductor devices and materialsSemiconductor materials and devicesMetal and Thin Film Mechanics