Microstructure and texture of polycrystalline 3C–SiC thick films characterized via EBSD
Youfeng Lai, Suling Zhao, Tingting Luo, Qingfang Xu, Chengyin Liu, K. Liu, Qizhong Li, Meijun Yang, Song Zhang, Mingxu Han, Takashi Goto, Rong Tu
Topics & Concepts
Materials scienceElectron backscatter diffractionEquiaxed crystalsMicrostructureCrystalliteTexture (cosmology)Composite materialChemical vapor depositionStacking faultSilicon carbideStackingCrystallographyMetallurgyNanotechnologyNuclear magnetic resonanceDislocationImage (mathematics)Artificial intelligenceChemistryPhysicsComputer scienceSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisSemiconductor materials and devices