Multimode photoacoustic characterization of subsurface damage in ground thin wafers
Zaiwei Liu, Bin Lin, Xiaohu Liang, Xiaokang Ma, Yangfan Wan
Topics & Concepts
Materials scienceLamb wavesWaferOpticsRayleigh waveMulti-mode optical fiberRayleigh scatteringUltrasonic sensorLaserPhotoacoustic effectGuided wave testingAcousticsSurface waveOptoelectronicsOptical fiberPhysicsUltrasonics and Acoustic Wave PropagationAdvanced Surface Polishing TechniquesNon-Destructive Testing Techniques