On the formation and features of the supra-wavelength grooves generated during femtosecond laser surface structuring of silicon
Elaheh Allahyari, Jijil JJ Nivas, Evangelos Skoulas, R. Bruzzese, George D. Tsibidis, Emmanuel Stratakis, S. Amoruso
Topics & Concepts
WavelengthFemtosecondSiliconMaterials scienceLaserOpticsStructuringOptoelectronicsPhysicsEconomicsFinanceLaser Material Processing TechniquesLaser-induced spectroscopy and plasmaOcular and Laser Science Research