Influence of colloidal silica properties on chemical mechanical polishing of zirconia ceramics
Wenkun Lin, Yuxuan Qi, Xueju Zhang, Yunyun Gu, Yue Wang, Hongwei Qian, Hui Luo, Jiapeng Chen
Topics & Concepts
Materials scienceCubic zirconiaPolishingCeramicColloidal silicaChemical-mechanical planarizationComposite materialColloidChemical engineeringCoatingEngineeringAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisAdvanced materials and composites