Cetyltrimethylammonium bromide reformed ceria nanocomposites of chemical mechanical planarization for silica wafers

You‒Sheng Lin, Kuen‒Song Lin, Wei‒Chin Tsai, Ndumiso Vukile Mdlovu, Cheng‒Yan Tang, U‒Ser Jeng, U‒Ser Jeng

2023Journal of the Taiwan Institute of Chemical Engineers12 citationsDOI

Topics & Concepts

Chemical-mechanical planarizationMaterials scienceTetraethyl orthosilicateScanning electron microscopeChemical engineeringDynamic light scatteringWaferZeta potentialFourier transform infrared spectroscopyPolishingAnalytical Chemistry (journal)NanoparticleComposite materialNanotechnologyChemistryOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced Nanomaterials in CatalysisAnalytical chemistry methods development