Fabrication of a microlens array on diamond for Shack-Hartmann sensor
Yan Liang, Tianfei Zhu, Xinling Du, Jinliang Xu, Shuwei Fan, Hongxing Wang
Topics & Concepts
MicrolensDiamondMaterials scienceOpticsPhotoresistPhotolithographyFabricationOptoelectronicsLens (geology)NanotechnologyPhysicsComposite materialMedicinePathologyAlternative medicineLayer (electronics)Adaptive optics and wavefront sensingOptical Systems and Laser TechnologyAdvanced optical system design