Ultrasonic vibration assisted chemical mechanical polishing research of PS/CeO2 core–shell abrasives on SiC ceramics
Shengqiang Jiang, Liuqing Liu, Jingjie Wang, Xu Li, Ming Mei, Sisi Liu, Zhiqiang Xu
Topics & Concepts
PolishingMaterials scienceCeramicChemical-mechanical planarizationUltrasonic sensorComposite materialCore (optical fiber)Shell (structure)VibrationMetallurgyAcousticsPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced materials and composites