Effect of power density on compositional and structural evolution of ITO thin film by HiPIMS method
Ming-Jie Zhao, Jin-Fa Zhang, Jie Huang, Qi-Hui Huang, Wan-Yu Wu, Ming-Chun Tseng, Chien-Jung Huang, Hao‐Chung Kuo, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
High-power impulse magnetron sputteringMaterials sciencePassivationDopingSputteringSputter depositionPower densityAnalytical Chemistry (journal)Thin filmOptoelectronicsChemistryNanotechnologyQuantum mechanicsChromatographyPhysicsPower (physics)Layer (electronics)ZnO doping and propertiesThin-Film Transistor TechnologiesGas Sensing Nanomaterials and Sensors