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Study of subsurface damage during nano-grinding of B3-GaN using molecular dynamics simulations

Yunlong Li, Jiayun Deng, Xiaojing Yang, Ningjin Peng

2023Materials Science in Semiconductor Processing18 citationsDOI

Topics & Concepts

Materials scienceGrindingWurtzite crystal structureAmorphous solidNucleationMolecular dynamicsGallium nitrideAbrasiveDislocationComposite materialMetallurgyCrystallographyZincLayer (electronics)ThermodynamicsComputational chemistryPhysicsChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices
Study of subsurface damage during nano-grinding of B3-GaN using molecular dynamics simulations | Litcius