Design, fabrication, and thermal zero drift compensation of a SOI pressure sensor for high temperature applications
Zhou Mao, Shiwei Zhou, Zhizhong Zhou, Jiang Shuwen, Wanli Zhang
Topics & Concepts
FabricationSilicon on insulatorCompensation (psychology)ThermalMaterials scienceZero (linguistics)OptoelectronicsPressure sensorElectrical engineeringElectronic engineeringEngineeringPhysicsMechanical engineeringSiliconThermodynamicsPhilosophyAlternative medicinePsychologyMedicineLinguisticsPathologyPsychoanalysisAdvanced MEMS and NEMS TechnologiesAdvanced Sensor Technologies ResearchMechanical and Optical Resonators