Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging
Lanxuan Zhang, Yingzhi Li, Bo-Song Chen, Yubing Wang, Hongmei Li, Yu Hou, Min Tao, Yuxuan Li, Zihao Zhi, Xiaobin Liu, Xuetong Li, Quanxin Na, Qijie Xie, Mingshi Zhang, Xueyan Li, Fengli Gao, Xianshu Luo, Guo‐Qiang Lo, Junfeng Song
Abstract
Silicon based optoelectronic integrated optical phased array is attractive owing to large-dense integration, large scanning range and CMOS compatibility. In this paper, we design and fabricate a SiN-on-SOI two-dimensional optical phased array chip. We demonstrate a two-dimensional scanning range of 96°×14.4° and 690 mW peak power of the main lobe. Additionally, we set up the time of flight (ToF) and frequency-modulated continuous-wave (FMCW) ranging systems by using this optical phased array chip, and achieve the objects detection at the range of 20 m in the ToF system and 109 m in the FMCW system, respectively.