Tuning diamond electronic properties for functional device applications
Anliang Lu, Limin Yang, Chaoqun Dang, Heyi Wang, Yang Zhang, Xiaocui Li, Hongti Zhang, Yang Lü
Abstract
Because of its ultrahigh hardness, synthetic diamond has been widely used in advanced manufacturing and mechanical engineering. As an ultra-wide bandgap semiconductor, on the other hand, diamond recently shows a great potential in electronics industry due to its outstanding physical properties. However, like silicon-based electronics, the electrical properties of diamond should be well modulated before it can be practically used in electronic devices. In this work, we briefly review the recent progresses in producing high-quality, electronic grade synthetic diamonds, as well as several typical strategies, from the conventional element doping to the emerging "elastic strain engineering," (ESE) for tuning the electrical and functional properties of microfabricated diamonds. We also briefly show some device application demonstrations of diamond and outline some remaining challenges that are impeding diamond's further practical applications as functional devices and offer some perspective for future functional diamond development.<br/><br/>© 2022 The Author(s). Published by informa UK limited, trading as Taylor & Francis Group, on behalf of Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.